You could file a complaint with local authorities, but realistically, perjury claims are rarely prosecuted.
Filing a false proof of service could put a process server's registration in jeopardy. Contact the county where the server is registered for more information.
You could try suing the server for making false statements about you.
This is probably best handled in front of the judge handling your case challenging the service. Have the process server called to the stand to testify and have your witnesses.